Semiconductor-grade vacuum pumps dry oil-free screw vacuum pumps

Oil-free screw vacuum pumps are vacuum acquisition devices that use non-contact screw rotors to achieve dry gas compression.

  • Working Pressure:7[ bar ]101.5[ psig ]
  • Free Air Delivery:247~3000[ cfm ]7~85[ m3/min ]
  • Working Power:5.5~90[ kw ]7.5~125[ hp ]

Product Details

RKV50APM (4).jpg

Features and Advantages

1. Clean and Oil-Free

A core advantage. Minimal clearance between rotors and between the rotor and the pump chamber eliminates 

friction and the need for oil seals and lubrication, providing a clean vacuum environment and preventing oil 

vapor contamination of process materials.

2. Stable Pumping Speed and High Vacuum

Maintains a stable pumping speed over a wide pressure range (from atmospheric pressure to high vacuum). 

A single-stage pump can achieve high ultimate vacuums (typically < 1 Pa or even 0.1 Pa).

3. Corrosion Resistance and Effective Handling of Condensable Gases

Corrosive process gases can be handled by selecting special coatings (such as nickel-phosphorus plating or Teflon) 

or corrosion-resistant materials. It exhibits good resistance to condensable vapors (such as water vapor and solvent 

vapors), is less prone to liquid slugging, and is an ideal replacement for steam jet pumps.

4. Low Maintenance Costs and Long Service Life

Dry operation eliminates the need for expensive vacuum oil, oil filters, and waste oil disposal costs. Compact 

design and long maintenance intervals.



Technical Parameters

ModelPower
(kW)
Max.VacuumMax.Capacity
(m³/min)
Inlet
Connection
(mm)
Outlet
Connection
(mm)
Weight
(kg)
Dimensions
(mm)
bar
RKV7.5APM5.5 










0.7 

7.0 DN100DN80870 1480*1000*1350
RKV10APM7.5 9.5 DN100DN80870 1480*1000*1350
RKV15APM11 12.2 DN100DN80930 1550*1060*1450
RKV20APM15 15.0 DN100DN80980 1550*1060*1450
RKV25APM18.5 17.5 DN125DN1001500 1600*1300*1700
RKV30APM22 23.3 DN125DN1001550 1600*1300*1700
RKV40APM30 27.0 DN125DN1001650 1600*1560*1700
RKV50APM37 30.0 DN125DN1001700 1600*1560*1700
RKV60APM45 43.3 DN200DN1501900 2860*1750*2050
RKV75APM55 61.0 DN200DN1502000 2860*1750*2050
RKV100APM75 75.0 DN250DN2003000 3300*2200*2250
RKV125APM90 85.0 DN250DN2003100 3300*2200*2250