High Pressure Oil-Free Helium Gas Compressor for Semiconductor Manufacturing

The Helium Gas Compressor is a high‑pressure, positive‑displacement compressor specifically engineered for handling helium gas. With a maximum discharge pressure of 160 Bar (16 MPa) and a flow capacit

  • Working Pressure:4~160[ bar ]58~2320[ psig ]
  • Free Air Delivery:1.7[ cfm ]60[ m3/min ]
  • Working Power:7.5~55[ kw ]10~75[ hp ]

Product Details

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Product features

  • Ultra‑High Discharge Pressure – Delivers up to 160 Bar, suitable for high‑pressure cylinder filling, system pressurization, and other high‑head applications.

  • Stable Flow Capacity – Provides consistent flow up to 100 Nm³/h, meeting the needs of continuous or intermittent processes.

  • Energy Efficient – Low power consumption (≤55kW) reduces operating costs while maintaining high output.

  • Optimized Speed Range – Operates at 400‑600 r/min, balancing mechanical reliability and durability with lower wear.

  • Broad Inlet Pressure Adaptability – Handles intake pressures up to 4 Bar, making it compatible with various upstream gas sources.

  • Robust Construction – Built with durable materials and sealing systems to prevent helium leakage (critical for this scarce and expensive gas).

  • Oil‑Free Option Available – Can be configured with oil‑free components to meet high‑purity requirements (e.g., semiconductor, medical, or research applications).

Technical Parameters

  • Power range: ≤55kW

  • Speed range: 400-600r/min

  • Flow range: ≤100Nm3/h

  • Intake pressure: ≤4 Bar

  • Exhaust pressure: ≤160Bar